Electrostatic analysis of backscattered heavy ions for semiconductor surface investigation
نویسندگان
چکیده
2014 The capabilities of Rutherford backscattering in surface analysis are limited by the energy resolution of the solid state detectors and their rapid degradation for heavier projectiles. Here, we investigate the possibilities of an electrostatic analyser (ESA) detecting heavy projectiles (7Li+, 12C+) backscattered from various compound semiconductor surfaces, essentially with respect to mass and depth resolution. Roruo Pfii’,,., Appl, 16 (1981) lô5-t72 AVRIL 1981, Classification Physics Abstracts 29.30h 29.70e 61.80Mk
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